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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">国外研发出金刚石半导体新型激光切片技术 </h1> <p class="xg1"> 时间：2023-8-7 10:55<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(681)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=9834&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a>来自: OFWEEK</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>金刚石是半导体工业的一种很有前途的材料，但将其切割成薄晶圆，确实是一项令人头疼的挑战。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div> 金刚石是<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>工业的一种很有前途的<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>，但将其切割成薄晶圆，确实是一项令人头疼的挑战。</div><div><br></div><div> 在最近的一项研究中，千叶大学的一个研究小组开发了一种新的基于<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>的技术，可以沿着最佳的<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>平面切割钻石。这一发现将有助于使这种材料在电动汽车的高效功率转换、高速<a href="http://ofc.oecr.com" target="_blank" class="relatedlink">通信</a>技术中更具成本效益。</div><div><br></div><div> 此前，尽管金刚石的特性对半导体工业具有吸引力，但由于目前市场上仍缺乏高效地将金刚石切割成薄片的技术，金刚石材料的应用受到了限制。在不能高效切片的情况下，晶圆必须一张一张地合成，这使得其在大多数行业的制造成本过高。</div><div><br></div><div> 最近，由千叶大学工程研究生院Hirofumi Hidai教授领导的日本研究小组已经找到了解决这个问题的方法。</div><div><br></div><div> 在最近发表在《钻石与相关材料》（Diamonds and Related Materials）杂志上的一项研究中，他们报告了一种新的基于激光的切片技术，该技术可用于沿最佳晶面清洁地切割钻石，以产生光滑的晶圆。</div><div><br></div><div> 包括钻石在内的大多数晶体的性质都是沿着不同的晶面（假想的包含组成晶体的原子的表面）变化的。例如，金刚石可以沿着｛111｝的表面很容易地切割。然而，切片｛100｝是具有挑战性的，因为它也会沿着解理面｛111｝产生裂纹，这增加了缺口损失。</div><div><br></div><div> 为了防止这些不良裂纹的传播，研究人员开发了一种金刚石<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>技术，将短激光脉冲聚焦在材料内狭窄的锥形体积上。</div><div><br></div><div> Hidai教授解释称：“集中激光照射将金刚石转化为无定形碳，其密度低于金刚石。因此，被激光脉冲改变的区域的密度会降低，并可能形成裂缝。”</div><div><br></div><div> 通过将这些激光脉冲照射到一个方形网格模式的透明钻石样本上，研究人员在材料内部创建了一个网格，该网格由容易出现裂缝的小区域组成。如果网格中修改区域之间的间距和每个区域使用的激光脉冲数是最优的，则所有修改区域通过优先沿｛100｝平面传播的小裂纹相互连接。因此，只要将锋利的钨针推到样品的一侧，就可以很容易地将表面为｛100｝的光滑晶圆与块的其余部分分开。</div><div><br></div><div> 总体而言，上述技术是使金刚石成为未来技术中合适的半导体材料的关键一步。在这方面，Hidai教授说：“金刚石切片能够以低成本生产高质量的晶圆，对于金刚石半导体器件的制造至关重要。因此，这项研究使我们离实现金刚石半导体在社会上的各种应用更近了一步，例如提高电动汽车和火车的功率转换率。”</div><div><br></div><div><section microsoft="" yahei",="" simsun;="" margin:="" 0px;="" padding:="" background-color:="" rgb(255,="" 255,="" 255);"="" 255);="" overflow-wrap:="" normal;"="" style="word-wrap: normal; color: rgb(143, 143, 143); font-family: Tahoma, "Microsoft Yahei", Simsun; background-color: rgb(255, 255, 255);"><p style="word-wrap: normal; margin: 0px; padding: 0px 0px 1em; overflow-wrap: normal; border: 0px currentcolor; line-height: 2; text-indent: 2em;"><span style="word-wrap: normal; overflow-wrap: normal; text-indent: 2em; font-size: 16px;"><font color="#31424e" face="微软雅黑" style="word-wrap: normal; overflow-wrap: normal;"><b style="word-wrap: normal; overflow-wrap: normal;">免责声明：编写或转载此文是为了传递更多的信息，为光电行业尽一些绵薄之力。若文字或图片侵犯了您的合法权益或有不当之处，请作者在20个工作日之内与我们联系，我们将协调给予处理。</b></font></span></p><p style="word-wrap: normal; margin: 0px; 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