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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=10207&size=small" /></div> <h1 class="ph">研发改进提升薄膜光伏的效率 </h1> <p class="xg1"> 时间：2010-5-28 23:37<a class="zz" href="home.php?mod=space&uid=10207">作者：乏味</a> 阅读<em id="_viewnum">(2424)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>欧瑞康太阳能专有的用于TCO沉积的低压化学气相沉积（LPCVD）工艺致使硅结内的光捕捉和光吸收的能力更高。通过改善TCO和单结非晶硅的协同作用，该创世界纪录的效率增益将改善商用薄膜硅光伏组件（对于单结非晶硅和非微 ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><DIV>作者：刘文斌，Michael Schmidt, Dr. Johannes Meier, 欧瑞康<a href="http://solar.oecr.com" target="_blank" class="relatedlink">太阳能</a>,www.oerlikon.com</DIV> <DIV> </DIV> <DIV>最近由美国国家可再生能源实验室确认的欧瑞康太阳能所取得的单结非晶硅<a href="http://solar.oecr.com" target="_blank" class="relatedlink">光伏</a>电池效率的世界纪录（超过10%的稳定效率）是<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>硅技术的重要进展，并将成为在未来若干年中降低薄膜硅技术成本提高其竞争力的关键因素。该成就源自公司投入的大规模研发项目，展示了设备供应商在加速技术进展和升级方面的潜在能力。该成就是得益于两个关键因素——优化的非晶硅结和优化的用于电池正背电极的透明导电氧化物（TCO）层（氧化锌）。欧瑞康太阳能专有的用于TCO沉积的低压化学气相沉积（LPCVD）<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>致使硅结内的光捕捉和光吸收的能力更高。通过改善TCO和单结非晶硅的协同作用，该创世界纪录的效率增益将改善商用薄膜硅光伏组件（对于单结非晶硅和非微晶类型）的性能。</DIV> <DIV> </DIV> <DIV> <P><A href="http://www.oecr.com/data/attachment/portal/201005/28/233539s0x1x0hlxbxcqa51.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201005/28/233539s0x1x0hlxbxcqa51.jpg"></A></P></DIV> <DIV>图1. 全球整个电力<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>市场需求增长迅速。2006年电力产品已达到1900万GW。（来源：EIA）</DIV> <DIV> </DIV> <DIV> <P><A href="http://www.oecr.com/data/attachment/portal/201005/28/23355705756071x01m166m.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201005/28/23355705756071x01m166m.jpg"></A></P></DIV> <DIV>图2. 光伏市场的成长过程。薄膜光伏比其他光伏技术成长更快速。薄膜技术预计在未来5年增长迅猛，并逐渐获得市场份额。(来源：Oerlikon Solar)</DIV> <DIV> </DIV> <DIV>随着全球从2008年至2009年的深度且持续的经济危机中复苏过来，太阳能光伏市场预计在2010年将恢复快速增长。伴随着太阳能产生能源成本的持续降低并在很多地区接近了传统能源的生产成本，我们预期看到加速市场增长的一个持续阶段。过去，太阳能在全球能源产量中的比重很小（图1），但在不久的将来会有较大增长。图2<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a>可再生能源预计将以每年超过30%的速度增长。诸如欧瑞康太阳能领先的微晶硅技术的薄膜光伏技术，在今日市场中占据了有利地位（2009年占总出货量的大约25%）。这些需求推动了研发部门进一步改进技术使太阳能更为经济可行。这次创世界纪录的薄膜硅电池效率是技术进展将进一步拉低光伏能源成本的很好例证。</DIV> <DIV> </DIV> <DIV>薄膜硅（单结或叠层/微晶硅）是三种领先的薄膜光伏技术之一，另外两种是碲化镉（CdTe）和铜铟镓硒（CIGS）。所有这些技术都有其存在的优势。CdTe和CISG都是直接带隙<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>。这些因素提供了高效率的保障，因为在这些物质中光子易于产生<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>空穴对及随后的电力生成。然而，这些技术也基于复杂的复合多晶<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>，在沉积、结晶和厚度方面均需要非常仔细地控制，从而使生产过程难以驾驭。</DIV> <DIV> <P><A href="http://www.oecr.com/data/attachment/portal/201005/28/2336256jjh45112e91rcao.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201005/28/2336256jjh45112e91rcao.jpg"></A></P></DIV> <DIV>图3. 高效率薄膜硅电池技术在转换效率方面有将近50%的提高。</DIV> <DIV> </DIV> <DIV>薄膜硅光伏技术具有悠久的历史，硅也是现代科学所知研究最为广泛的材料。这当然要部分归功于大规模且开放的半导体产业在过去50年中持续地推进硅技术。即便硅是间接带隙材料，且<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>硅所创的效率纪录现在也相当高了，约25%，但最终这也没有限制薄膜硅获得与传统晶硅光伏电池同等的效率。图3展示了高效率薄膜硅太阳能电池的构造。初始非晶硅层上增加了一层更厚的微晶薄膜硅层，可响应阳光中更长波长部分（红至近红外）。合在一起，这就是所知的微晶硅叠层结构，与传统的单结非晶硅层相比，在光转换效率方面有将近50%的提高。通过将非晶硅太阳能电池的累积改进，以及前后接触TCO的改进相结合，欧瑞康太阳能使高效率大面积的设备成为可能。</DIV> <DIV> </DIV> <DIV>薄膜硅电池创纪录性能的通过以下细节实现：</DIV> <DIV> </DIV> <DIV>先进的硅膜沉积</DIV> <DIV> </DIV> <DIV> <P><A href="http://www.oecr.com/data/attachment/portal/201005/28/233630gkkzkkk13ggktygr.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201005/28/233630gkkzkkk13ggktygr.jpg"></A></P></DIV> <DIV>图4. a-Si/uc-Si电池结构中对每一层的TCO层优化。</DIV> <DIV> </DIV> <DIV>通过引入超高频VHF激励频率(40MHz)的单室等离子体增强化学气相沉积(PECVD)工艺，可沉积得到高质量的本征非晶硅吸收层，从而得到高性能P-i-n太阳能电池器件（图4）。得益于欧瑞康太阳能的单室工艺，重要的界面特性能够在KAI（PECVD）反应器内得到简单的完全控制。更进一步的是，由于相比多室概念减少了处理步骤，工艺时间能够缩短。另外，Plasmabox?使每次电池沉积工艺后可进行自清洗，避免反应室内的记忆效应。由此可以得到很好的工艺控制。</DIV> <DIV> </DIV> <DIV>用于前后接触面的先进TCO</DIV> <DIV> <P><A href="http://www.oecr.com/data/attachment/portal/201005/28/233634k0ieukk3g0d3kejg.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201005/28/233634k0ieukk3g0d3kejg.jpg"></A></P></DIV> <DIV>图5. 非晶硅p-i-n：NREL已经确认了其10.09%的稳定效率。</DIV> <DIV> </DIV> <DIV>通过使用低压化学气相沉积（LPCVD）工艺在薄膜硅层的前后沉积氧化锌（ZnO）可获得一致的高质量高性能的薄膜硅光伏电池和组件。欧瑞康太阳能所特有的TCO前后电极技术在获得薄膜硅电池创纪录效率水平方面起到了关键作用。含ZnO的TCO层透明度高且导电性好。当采用LPCVD工艺生长，ZnO层呈多晶的自然状态，且晶体结构“面”的高度和表面生长周期均可控。这使得TCO能得到有效地 “调控”，使其能够散射和反射光谱的特定部分。相比之下，传统的基于溅射生长的ZnO膜不能优化这些效果。图5展示了相似的叠层微晶硅器件通过恰当优化TCO层的属性得到了改进。ZnO膜通常由其在全谱光散射<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测量</a>中生成的“绒面”水平定性；“绒面”水平越高，所涉的散射更多。“A型”TCO是12%的“绒面”膜，在光学属性上针对更短波长（“蓝”）优化的a-Si层。反过来，欧瑞康太阳能的微晶硅钽结器件中的“B型”TCO是40%“绒面”膜，在光学属性上匹配更长波长（“红和近红外”）微晶硅?c-Si层。</DIV> <DIV> </DIV> <DIV>通过仔细优化a-Si或叠层(a-Si/?c-Si)器件内的TCO层，即便在单结结构中也可获得整体效率的显著提高（图5）。</DIV> <DIV> </DIV> <DIV>结论</DIV> <DIV> </DIV> <DIV>欧瑞康太阳能所取得的薄膜硅新效率水平世界纪录（单结电池超过10%的稳定效率）是领先的设备供应商集中研发力量改进薄膜硅光伏性能及降低其成本方面所取得进展的证明。薄膜硅太阳能技术具备稳健性和良好的特性，在效率方面所获得的提升预示着该技术的进一步市场扩展。由设备供应商和他们客户所取得的持续改进正在降低薄膜硅的成本结构，并同时提高了工厂的吞吐率，使得低成本太阳能组件适用于多种应用场合，特别适合大规模公用事业的应用。</DIV></td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" type="text/javascript"></script> <div id="click_div"><table cellpadding="0" cellspacing="0" class="atd"> <tr><td> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=click&op=add&clickid=1&idtype=aid&id=637&hash=ed6eee4c64af82a1d00a595095b04836&handlekey=clickhandle" id="click_aid_637_1" onclick="showWindow(this.id, this.href);doane(event);"> <img src="static/image/click/jidan.gif" alt="" /><br />鸡蛋</a> </td> <td> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=click&op=add&clickid=2&idtype=aid&id=637&hash=ed6eee4c64af82a1d00a595095b04836&handlekey=clickhandle" id="click_aid_637_2" onclick="showWindow(this.id, 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