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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">消除平场扫描镜(F-Theta)的后反点的不利影响 </h1> <p class="xg1"> 时间：2017-8-4 09:24<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(961)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=5921&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>激光扫描系统是一种将时间信息转变为可记录空问信息的系统。它使某种信息通过光调制器对激光束调制后，经光束扫描器和F-Theta激光聚焦镜头再接收形成一维或二维扫描图像。它已被广泛用于标刻机、导弹跟踪瞄准、激光 ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div><span style="line-height: 1.8em;"> <a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>扫描系统是一种将时间信息转变为可记录空问信息的系统。它使某种信息通过光调制器对激光束调制后，经光束扫描器和F-Theta激光聚焦镜头再接收形成一维或二维扫描图像。它已被广泛用于标刻机、导弹跟踪瞄准、激光打印机、传真机、集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>激光图形发生器等激光扫描精密设备中。</span></div><div><br></div><div> 激光打标是激光技术的一个重要的应用领域，它与传统的刻蚀、机刻等打标方式相比，有许多优点，如无污染、分辨率高、非接触及标记永久保持等。激光束到达工件表面的瞬间，光能转换为热能，使工件表面<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>熔融甚至汽化，从而标刻出相应的图案或标记。</div><div><br></div><div> 激光打标机的工作原理如图1所示，激光器发出的高能量激光束依次经过动方向互相垂直的X和Y扫描振镜，入射到F-Theta物镜，由F-Theta后到达工件表面。通过转动X和Y扫描振镜，可以控制激光束在工件表面的X和Y两个方向上任意移动，实现矢量打标。振镜式激光打标具有响应速度快、打标速度快、打标质量高等许多优点。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201708/04/092242t2mig9siz9fsl7d2.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092242t2mig9siz9fsl7d2.jpg"></a></p></div><div style="text-align: center;"><br></div><div style="text-align: center;"> 图1激光打标机工作原理图</div><div><br></div><div> 与普通成像物镜不同，F-Theta镜头的像高与视场角成正比。如图2所示镜头的视场角、焦距和像高满足下式所示的关系：</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201708/04/092301x1gukk95h8fku1ng.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092301x1gukk95h8fku1ng.jpg"></a></p></div><div><br></div><div> 式中θ、f、y分别表示F-Theta镜头的视场角、焦距和像高。表示当F-Theta焦距一定时，像高y与视场角θ成正比，满足线性关系。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201708/04/092315aqt7awvz7q58zduj.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092315aqt7awvz7q58zduj.jpg"></a></p></div><div><br></div><div style="text-align: center;"> 图2．F-Theta镜头原理图</div><div><br></div><div> 为满足式（1-1）的线性扫描关系，同时校正F-Theta镜头的像差，往往需要多个透镜合理布局；激光在透镜表面的后反射点（图3-图6）能量高度集中，随着工业使用中激光功率的不断提升，如果后反射点聚焦在X\Y振镜片上，会烧蚀振镜片的反射膜层，造成系统透过率的大幅降低；如果后反射点聚焦在扫描镜内部镜片上（图6），造成明显的热透镜效应，该透镜折射率随着能量的积聚发生变化，直接改变扫描镜的工作距离，反映为标记光斑变大、标记颜色变浅甚至无法标记。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201708/04/092325jrt3vlbymu91b2yb.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092325jrt3vlbymu91b2yb.jpg"></a></p></div><div><br></div><div style="text-align: center;"> 图3 后反射点示意1</div><div style="text-align: center;"><br></div><div style="text-align: center;"><p><a href="data/attachment/portal/201708/04/092334q5t45tq4qu46trcq.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092334q5t45tq4qu46trcq.jpg"></a></p></div><div><br></div><div style="text-align: center;"> 图4后反射点示意2</div><div style="text-align: center;"><br></div><div style="text-align: center;"><p><a href="data/attachment/portal/201708/04/092345q9a1l7kfjh3lacfh.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092345q9a1l7kfjh3lacfh.jpg"></a></p></div><div><br></div><div style="text-align: center;"> 图5后反射点示意3</div><div style="text-align: center;"><br></div><div style="text-align: center;"><p><a href="data/attachment/portal/201708/04/092354uhrvhkv2beaha2hk.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092354uhrvhkv2beaha2hk.jpg"></a></p></div><div><br></div><div style="text-align: center;"> 图6后反射点示意4</div><div><br></div><div> 综上在设计F-theta平场扫描镜时要仔细排查每个镜片表面的后反射点，通过改变镜片的曲率半径尽量消除后反射点的不利影响。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201708/04/092407s3ehplbwobqo5191.jpg" target="_blank"><img src="data/attachment/portal/201708/04/092407s3ehplbwobqo5191.jpg"></a></p><p style="text-align: center;"><br></p><p 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