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class="ss"><div><span>导读： </span>现在，麻省理工学院和芝加哥的一个研究小组已经找到了一种方法，可以突破限制，并使人们能够生产一些极窄的电线，利用一个过程，可以很容易地进行大规模生产和标准化各种设备。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div> 越来越小的微芯片上，以适应目前对于单一芯片集成的技术趋势，从而继续朝着更快，更强大的计算机技术不懈进步。</div><div><br></div><div> <b>而最近这种技术的进展变得更加困难，因为这种制造过程碰到了基本的限制，例如，用于创建图案的光的波长。</b></div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201703/29/095809iq4nnylt1r1hrwhz.jpg" target="_blank"><img src="data/attachment/portal/201703/29/095809iq4nnylt1r1hrwhz.jpg"></a></p></div><div><br></div><div> 现在，<b><font color="#f00000">麻省理工学院和芝加哥的一个研究小组已经找到了一种方法，可以突破这些限制，并使人们能够生产一些极窄的电线，利用一个过程，可以很容易地进行大规模生产和标准化各种设备。</font></b></div><div><br></div><div> 新的研究结果发表在本周的《自然<a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>技术》杂志上，这一研究由博士后研究生Priya Moni、Han Kim和Karen Gleason教授，以及与麻省理工学院的博士后Hyo Seon Suh，Paul Nealey教授，和另外在芝加哥大学和阿贡国家实验室的三人共同合作完成。虽然有其他方法可以实现这样的细的<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>，该小组说，但都没有大规模生产的成本效益。</div><div><br></div><div> 新方法采用自组装技术，其中被称为嵌段共聚物的<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>被第二聚合物覆盖。他们通过加热整体蒸发从而在表面上沉积形成第一层表面，然后让它凝结在冷的表面，就像天气热时，一杯冷饮的玻璃上会凝结小水滴一样。</div><div><br></div><div> “人们总是想要更小的模式，但实现这一越来越昂贵，” Gleason说，他是麻省理工学院的副教务长，以及化学工程教授。利用今天所用的方法，对于小于约22纳米（十亿分之一米）大小规模的生产，一般需要在芯片表面建立一个图像逐行扫描<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>束或离子，这是一种非常缓慢的过程，因此若要大规模实施其花费是十分昂贵的。</div><div><br></div><div> 新的过程采用了两种现有方法的一种新的集成方式。首先，使用标准光刻技术在芯片表面产生线条图案，其中光通过放置在芯片表面上的负掩模照射。该表面被化学蚀刻，使被照亮的区域被溶解，让它们之间的空间形成作为导电的“导线”连接电路的部分。</div><div><br></div><div> 然后，一层被称为一个嵌段共聚物的材料，即一种混合两个不同的高分子的材料，自然分离成层或其他可预见的模式交替通过旋涂液组成。嵌段共聚物材料由链状分子组成，每个分子由两个不同的聚合物材料连接而成。</div><div><br></div><div> “一半是友好的石油，另一半是友好的水，”Kim解释说。“但由于他们是完全结合在一起，就像是它们是相互纠缠在一起了。”两中链状分子的尺寸预先设定了层或其他图案的尺寸，并当它们沉积时会自行装配成型。</div><div><br></div><div> 最后，使用化学气相沉积（CVD）将顶部的保护聚合物层沉积在顶部。事实证明，这顶面漆是这个过程的关键：它阻碍了嵌段共聚物自组装的方式，迫使它们形成垂直层而不是水平层，就像它侧面的一层蛋糕。</div><div><br></div><div> 底层的平版印刷图案引导这些层的定位，但该共聚物的自然倾向，导致他们的宽度要比基准线小得多。其结果是，现在有四（或更多，取决于化学）线，其中每一个宽度是四分之一大小代替原来的每一个。这种蚀刻层“控制方向和队列”后产生细纹，Moni解释说。</div><div><br></div><div> 由于顶部聚合物层还可以被图案化，所以该系统可用于建立任何复杂的图案，如需要的微芯片的互连。</div><div><br></div><div> 大多数微芯片制造设备使用现有的光刻方法，CVD过程本身是一个很好理解的附加步骤，可以相对容易地添加。因此，实施新方法可能实现比其他方法更精细的线条，如使用极端的紫外线，这将需要开发新光源和新的镜头，以集中光线。利用新的方法， Gleason说，“你不需要改变所有这些机器。所涉及的一切都是利用的众所周知的材料。”</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201703/29/095834f6igxi2l26fu2tb4.jpg" target="_blank"><img src="data/attachment/portal/201703/29/095834f6igxi2l26fu2tb4.jpg"></a></p><p style="text-align: 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