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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=61" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=10207&size=small" /></div> <h1 class="ph">玻璃的RIE </h1> <p class="xg1"> 时间：2009-6-10 19:49<a class="zz" href="home.php?mod=space&uid=10207">作者：乏味</a> 阅读<em id="_viewnum">(4296)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=61" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>使用玻璃底板的晶圆级封装，需要在玻璃上开出细孔以取出布线。但众所周知，一般玻璃是很难开孔的。这是因为，玻璃不是结晶物质，因此不能使用结晶各向异性蚀刻。而湿蚀刻又具有各向同性</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><p>玻璃是构成MEMS的重要<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>，但存在蚀刻速率非常慢的问题。 </p> <p>使用玻璃底板的晶圆级封装，需要在玻璃上开出细孔以取出布线。但众所周知，一般玻璃是很难开孔的。这是因为，玻璃不是结晶物质，因此不能使用结晶各向异性蚀刻。而湿蚀刻又具有各向同性。要在厚500μm的玻璃板上开出直径为100μm的孔，则向深度方向掘500μm时，也会横向推进500μm，导致形成1mm左右的孔。 </p> <p>图1是一种用于<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>玻璃及水晶的Deep RIE装置。该装置将基于ICP的高密度等离子装置与磁电管RIE集于一体。 </p> <p> <a href="http://www.oecr.com/batch.download.php?aid=495" target="_blank"><img border="0" src="http://www.oecr.com/attachments/2009/06/10207_200906101951001Fg7k.jpg"></a><br>图1: 耐热玻璃的蚀刻装置 </p> <p>要提高蚀刻速率，只要不断丢弃反应生成物即可，基于这一考虑，在小型腔体上配备了大型涡轮分子泵。并且，由于设定了高底板偏压，离子会<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>性撞击底板，掩模同时也会遭到损坏。但如果考虑使用Ni<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">镀膜</a>或者类似SU-8的较厚光刻胶来作掩模，仍勉强可以蚀刻。即便如此蚀刻速度也只有0.5μm/分。而Si可达到10μm/分的水平。 </p> <p>玻璃存在蚀刻速率慢这一大问题。如果速度是0.5μm/分，则100分钟的蚀刻深度也只有50μm。6英寸晶圆时，无法处理直径15cm、厚50μm的超薄玻璃。因此，使用了如下技术（图2）。 </p> <p> <a href="http://www.oecr.com/batch.download.php?aid=496" target="_blank"><img border="0" src="http://www.oecr.com/attachments/2009/06/10207_200906101951221yZoB.jpg"></a><br>图2:支持大口径晶圆的玻璃贯通布线触点 </p> <p>首先，在玻璃底板上镀Ni形成厚掩模，利用上述的Deep RIE开出50μm的孔。然后，将玻璃底板翻转，在与加工好的Si底板对准位置的同时接合阳极。然后，从背面研磨玻璃底板。这时，由于事先已经与Si基板接合，因此玻璃无论研磨得再薄也不会碎。之后，以表面涂层性良好的CVD形成Cu电极，在多层陶瓷底板上进行倒装芯片焊接。最后，通过进行Si的掺杂物浓度依存性选择蚀刻，便可形成LSI<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测试</a>用的触点。 </p></td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" type="text/javascript"></script> <div id="click_div"><table 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