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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">碳纳米管/硅异质集成的三维互补式场效应晶体管技术提出 </h1> <p class="xg1"> 时间：2025-4-30 08:29<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(200)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=10251&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>随着集成电路密度提高，晶体管的工艺节点不断微缩，已逼近物理极限。三维互补式场效应晶体管（3D CMOS）技术成为破局的潜在路径。传统硅基3D CMOS集成技术热预算较高，导致工艺复杂成本提高，并可能引发性能退化等问 ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><p style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; list-style: none; font-size: 16px; font-family: 微软雅黑; color: rgb(68, 68, 68); background-color: rgb(255, 255, 255); text-indent: 2em; text-align: justify; margin-bottom: 26px !important; line-height: 32px !important;">随着集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>密度提高，<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>管的<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>节点不断微缩，已逼近<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>极限。三维互补式场效应晶体管（3D CMOS）技术成为破局的潜在路径。传统硅基3D CMOS集成技术热预算较高，导致工艺复杂成本提高，并可能引发性能退化等问题，限制了其商业应用。</p><p style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; list-style: none; font-size: 16px; font-family: 微软雅黑; color: rgb(68, 68, 68); background-color: rgb(255, 255, 255); text-indent: 2em; text-align: justify; margin-bottom: 26px !important; line-height: 32px !important;">针对上述问题，中国科学院微<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>研究所研究员李博与副研究员陆芃团队，基于碳<a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>管<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>低温成膜能力，提出碳纳米管/硅异质集成的3D CMOS技术，实现了180nm SOI器件后道的低温碳纳米管器件集成。该团队提出面向高性能数字电路应用的工艺优化方案，可实现碳纳米管器件阈值电压的精准调控，可完成N、P晶体管电学特性的匹配，使3D CMOS噪声容限提升，同时实现高增益、超低功耗和高均一性等优异性能。</p><p style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; list-style: none; font-size: 16px; font-family: 微软雅黑; color: rgb(68, 68, 68); background-color: rgb(255, 255, 255); text-indent: 2em; text-align: justify; margin-bottom: 26px !important; line-height: 32px !important;">进一步，为论证这一述技术在先进工艺节点中的集成能力，团队使用TCAD仿真搭建了14nm FinFET/CNT 3D CMOS电路单元。<a href="http://theory.oecr.com" target="_blank" class="relatedlink">理论</a>分析<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a>，该技术在噪声容限和功耗方面优于商用14nm-FinFET工艺。</p><p style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; list-style: none; font-size: 16px; font-family: 微软雅黑; color: rgb(68, 68, 68); background-color: rgb(255, 255, 255); text-indent: 2em; text-align: justify; margin-bottom: 26px !important; line-height: 32px !important;">相关研究成果以<em style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; margin-bottom: 26px !important; line-height: 32px !important;">Low-Thermal-Budget Construction of Carbon Nanotube p-FET on Silicon n-FET toward 3D CMOS FET Circuits with High Noise Margins and Ultra-Low Power Consumption</em>为题，发表在《先进功能材料》（<em style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; margin-bottom: 26px !important; line-height: 32px !important;">Advanced Functional Materials</em>）上。该工作由微电子所、南京大学、安徽大学合作完成。 </p><p style="text-align: center;"><a href="data/attachment/portal/202504/30/082922hfsppidcf67cp4ac.png" target="_blank"><img src="data/attachment/portal/202504/30/082922hfsppidcf67cp4ac.png"></a></p><p style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; list-style: none; font-size: 16px; font-family: 微软雅黑; color: rgb(68, 68, 68); background-color: rgb(255, 255, 255); text-align: center; margin-bottom: 26px !important; line-height: 32px !important;"><br></p><p style="margin-top: 0px; margin-right: 0px; margin-left: 0px; padding: 0px; border: 0px; list-style: none; font-size: 16px; line-height: 1.5em; font-family: 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href="http://club.oecr.com/space-uid-81142.html" class="xi2 xw1" c="1">helenwjx</a> <span class="xg1 xw0">2025-4-30 09:29</span> </dt> <dd>呵呵，低调，低调！</dd> </dl><a name="comment_anchor_35748"></a> <dl id="comment_35748_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(35748, '10251');">引用</a> </span> <a href="http://club.oecr.com/space-uid-55949.html" class="xi2 xw1" c="1">佰网佰网</a> <span class="xg1 xw0">2025-4-30 08:59</span> </dt> <dd>很好的文章，值得阅读。</dd> </dl><a name="comment_anchor_35747"></a> <dl id="comment_35747_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(35747, '10251');">引用</a> </span> <a href="http://club.oecr.com/space-uid-42072.html" class="xi2 xw1" c="1">chshdzhj</a> <span class="xg1 xw0">2025-4-30 08:29</span> </dt> <dd>是爷们的娘们的都帮顶！大力支持。</dd> </dl></div> </div> <!--[diy=diycontentcomment]--><div id="diycontentcomment" 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